Auger sputter profiling studies of the Si-SiO2 interface

• The Physics of SiO2 and Its Interfaces

citation

C. R. Helms, N. M. Johnson, S. A. Schwarz, and W. E. Spicer, "Auger sputter profiling studies of the Si-SiO2 interface," The Physics of SiO2 and Its Interfaces (Pergamon Press, New York, 1978), ed. S. T. Pantelides, pp. 366-372.