Pulsed laser crystallization of amorphous silicon for polysilicon flat panel imagers

• International Conference on Amorphous and Microcrystalline Semiconductors (ICAMS)

citation

Boyce, J. B. ; Lu, J. P. ; Ho, J. H. ; Street, R. A. ; Van Schuylenbergh, K. ; Wang, Y. Pulsed laser crystallization of amorphous silicon for polysilicon flat panel imagers. International Conference on Amorphous and Microcrystalline Semiconductors (ICAMS); 2001 August 27-31; Nice, France. In Journal of Non-Crystalline Solids Part B. 2002 April; 299-30: 731-735.