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Comparison of heteroepitaxial growth using hydride and solid sources

  • Electronic Materials Conference
 
 
citation

Bringans, R. D. ; Kipp, L. ; Biegelsen, D. K. ; Swartz, L. E. ; Northrup, J. E. Comparison of heteroepitaxial growth using hydride and solid sources. Electronic Materials Conference; 1995 June; Charlottesville; VA.

PARC authors

Ross Bringans
Lars-Erik Swartz
John E. Northrup

 

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Comparison of heteroepitaxial growth using hydride and solid sources: atomic scale characterization of the interaction of As4, AsH3 and PH3 with Si surfaces

 

 

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