Si diffusion and intermixing in AlGaAs/GaAs structures using buried impurity sources

• Applied Physics Letters

citation

Beernink, K. J. ; Thornton, R. L. ; Anderson, G. B. ; Emanuel, M. A. Si diffusion and intermixing in AlGaAs/GaAs structures using buried impurity sources. Applied Physics Letters. 1995 May 8; 66(19): 2522-2524.