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Si diffusion and intermixing in AlGaAs/GaAs structures using buried impurity sources

 
 
citation

Beernink, K. J. ; Thornton, R. L. ; Anderson, G. B. ; Emanuel, M. A. Si diffusion and intermixing in AlGaAs/GaAs structures using buried impurity sources. Applied Physics Letters. 1995 May 8; 66(19): 2522-2524.