homeresources & publications › remote plasma hydrogenation of mg-doped gan

TECHNICAL PUBLICATIONS:

Remote plasma hydrogenation of Mg-doped GaN

 
 
citation

Goetz, W .; Johnson, N. M. ; Walker, J. ; Bour, D. P. ; Amano, H. ; Akasaki, I. Remote plasma hydrogenation of Mg-doped GaN. 6th International Conference on Silicon Carbide and Related Materials; 1995 September 18; Kyoto, Japan.