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Dry-etching and characterization of mirrors on III-nitride laser diode structures from chemically assisted ion beam etching

 
 
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Kneissl, M .; Hofstetter, D. ; Bour, D. P. ; Donaldson, R.; Walker, J. ; Johnson, N. M. Dry-etching and characterization of mirrors on III-nitride laser diodes from chemically assisted ion beam etching. Second International Conference on Nitride Semiconductors; 1997 October 27-31; Tokushima, Japan. In Journal of Crystal Growth; 1998 June; 189-190: 846-849.