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Laser processing of polysilicon thin film transistors: grain growth and device fabrication

 
 
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Boyce, J. B. ; Mei, P. ; Fulks, R. T. ; Ho, J. H. Laser processing of polysilicon thin film transistors: grain growth and device fabrication. 18th International WE-Heraeus Workshop on Laser Crystallization and Modification of Semiconductors (LCMS 98); 1998 January 26-28. In Physica Status Solidi A. 1998 April 16; 166 (2): 729-741.