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Flat panel imagers based on excimer laser annealed, poly-Si thin film transistor technology

 
 
citation

Lu, J. P. ; Van Schuylenbergh, K. ; Fulks, R. T. ; Ho, J. H. ; Wang, Y. ; Lau, R. K. ; Nylen, P.; Mei, P. ; Mulato, M. ; Boyce, J. B. ; Street, R. A. Flat panel imagers based on excimer laser annealed, poly-Si thin film transistor technology. Spring 2001 Meeting of the Materials Research Society; 2001 April 16-20; San Francisco, CA.