Excimer laser annealed, poly-Si thin film transistors for flat panel imager application

• Device Research Conference

citation

Lu, J. P. ; Van Schuylenbergh, K. ; Ho, J. H. ; Wang, Y. ; Nylen, P.; Boyce, J. B. ; Street, R. A. Excimer laser annealed, poly-Si thin film transistors for flat panel imager application. 2001 Device Research Conference Digest; 2001 June 25-27; Notre Dame; IN. Piscataway, NJ: IEEE; 2001; 191-192.