Chlorine corrosion of aluminum interconnect from laser activated parylene in acoustic MEMS arrays

• Electrochemical Society (ECS) 201st Meeting

This is a slide presentation/talk given at Stanford University. It describes how an expert system like Eureka can help people in the field. The paper describes problems encountered and solutions to those problems. It discusses leverage points for community knowledge systems and other communities that Eureka-like systems might help.

citation

Young, M. ; Horine, D. ; Hadimioglu, B. B. ; Elrod, S. A. ; Sprague, R. A. ; Buhler, S. ; Russo, B. ; Sparks, T.; Rodkin, A. ; Nochebuena, R. ; Weisberg, M. ; Mikkelsen, J. C. Chlorine corrosion of aluminum interconnect from laser activated parylene in acoustic MEMS arrays. Electrochemical Society (ECS) 201st Meeting; 2002 May 12-17; Philadelphia, PA.