homeresources & publications › self-assembled out-of-plane high q inductors

TECHNICAL PUBLICATIONS:

Self-assembled out-of-plane high Q inductors

 
 
citation

Chua, C. L. ; Fork, D. K. ; Van Schuylenbergh, K. ; Lu, J. P. Self-assembled out-of-plane high Q inductors. Solid State Sensor, Actuator and Microsystems Workshop; 2002 June 2-6; Hilton Head; SC; USA.