EFAB Technology for Multilayer 3-D Micromanufacturing: Process, Applications, and Low-Cost Multi-Project Runs through MOSIS

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George E. Pake Auditorium 2005-05-12

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EFAB Technology for Multilayer 3-D Micromanufacturing: Process, Applications, and Low-Cost Multi-Project Runs through MOSIS

EFAB technology is an batch microfabrication process based on multi-layer selective electrodeposition of metals. The process is designed to rapidly form multiple independently-patterned metal layers on top of one another. This enables designers to create intricate and highly-miniaturized 3-D devices with unprecedented geometrical flexibility and ease-of-use in a variety of applications ranging from high-frequency communications and radar to multi-axis inertial sensing. Microfabrica and MOSIS recently announced EFAB(tm) Access (www.efabaccess.com), a service offering 3-D MEMS and microdevices via multi-project runs through MOSIS. The service gives corporations, academics, research labs, and individuals the ability to design 3-dimensional MEMS and microdevices and have prototypes produced economically through MOSIS. The deadline for the next EFAB Access run is June 27th.

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