Fabrication of vanadium oxide microbolometers on thin polyimide films
Details
2013 June 16-20; Barcelona, Spain
Speakers
Dirk De Bruyker
Event
Fabrication of vanadium oxide microbolometers on thin polyimide films
We report the fabrication and characterization of thin film vanadium oxide microbolometer detector elements on thin (12.5 um) polyimide films. The microbolometer detectors have been designed and are being evaluated for use in scanning radiometers aboard a satellite. Preliminary characterization results (nominal resistance, temperature coefficient, thermistor noise) are reported.
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