Fabrication of vanadium oxide microbolometers on thin polyimide films

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Dirk De Bruyker
Event

Fabrication of vanadium oxide microbolometers on thin polyimide films

We report the fabrication and characterization of thin film vanadium oxide microbolometer detector elements on thin (12.5 um) polyimide films. The microbolometer detectors have been designed and are being evaluated for use in scanning radiometers aboard a satellite. Preliminary characterization results (nominal resistance, temperature coefficient, thermistor noise) are reported.

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