MICRO-OBJECT ASSEMBLY WITH AN OPTICALLY ADDRESSED ARRAY

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MICRO-OBJECT ASSEMBLY WITH AN OPTICALLY ADDRESSED ARRAY

A microassembly system based on electric field manipulation is described. Optical addressing of a photo-transistor array controls the position and orientation of micro-objects using dielectrophoretic and electrophoretic forces. Open loop control is used to rapidly direct many micro-objects in parallel. Closed loop control is used to position micro-objects precisely. Demonstrations with beads (10um diameter) and silicon chips (150um scale) are presented. We have achieved coarse assembly at a rate of 1000 micro-objects per second, fine assembly of beads at micrometer scales, and arrays of silicon chips with orientation control. The technology aims to enable a generalized printer system for building engineered microstructure and electronics.

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