Optimization of MEMS devices

Micro-Electro-Mechanical Systems (MEMS) Industry is working towards the goal of achieving optimum, reliable, efficient and cost-effective designs for the manufactured products. It is one of the significant fields which looks up for help from the Computer Aided Engineering (CAE) Optimization Industry. Typical interests are in a) determining the optimum design of the MEMS components when subjected to conflicting multi-objectives, b) understanding the relations between the input variables and output variables of the MEMS components, c) reducing the computational time to obtain the end results quickly, d) finding the optimum robust design which is not very sensitive to the uncertainties of the input variables, e) finding the reliable design at six-sigma level context. By carrying out the above list of interests manually and without a dedicated tool is quite a challenge but nowadays there are optimization software packages which do the job for us.  In this presentation, different case-studies such as a) the thermo-electric actuator MEMS optimization, b)micro-mirror optimization, c)electro-statics structural optimization, d)gyroscope design optimization were analyzed and optimized to provide you with a proof of the easy, efficient, automated ways of performing the above optimization interests with a quality end-results using the sophisticated ANSYS & modeFRONTIER software tools.