Fabrication of vanadium oxide microbolometers on thin polyimide films

Details

Event International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2013)

Authors

Dirk De Bruyker
Technical Publications
June 16th 2013
We report the fabrication and characterization of thin film vanadium oxide microbolometer detector elements on thin (12.5 um) polyimide films. The microbolometer detectors have been designed and are being evaluated for use in scanning radiometers aboard a satellite. Preliminary characterization results (nominal resistance, temperature coefficient, thermistor noise) are reported.

Citation

De Bruyker, D. Fabrication of vanadium oxide microbolometers on thin polyimide films. 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2013); 2013 June 16-20; Barcelona, Spain. Piscataway, NJ: IEEE; 2013; 62-65.

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