Flexible x-ray detector array fabricated with oxide thin film transistors

Details

Event IEEE Electron Device Letters

Authors

Lujan, Rene A.
Street, Robert A.
Technical Publications
April 3rd 2012
A flat panel flexible x-ray image sensor fabricated with oxide thin film transistors (TFT) is described. Bottom gate GaInZnO TFTs are fabricated on a plastic substrate and integrated with amorphous silicon p-i-n photodiodes, with a maximum process temperature of 170C. X-ray images obtained with a 160x180 pixel array in the indirect detection mode are reported.

Citation

Lujan, R. A.; Street, R. A. Flexible x-ray detector array fabricated with oxide thin film transistors. IEEE Electron Device Letters. 2012 May; 33 (5): 688-690.

Additional information

Focus Areas

Our work is centered around a series of Focus Areas that we believe are the future of science and technology.

FIND OUT MORE
Licensing & Commercialization Opportunities

We’re continually developing new technologies, many of which are available for Commercialization.

FIND OUT MORE
News

PARC scientists and staffers are active members and contributors to the science and technology communities.

FIND OUT MORE